[15a-423-1~9] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-423-2] Depth profile of molecular orientation by nanoimprint-graphoepitaxy

〇Makoto Okada¹, Ryosuke Fujii², Yuichi Haruyama¹, Hiroshi Ono³, Nobuhiro Kawatsuki² (1.LASTI, Univ. of Hyogo, 2.Graduate School of Engineering, Univ. of Hyogo, 3.Nagaoka Univ. of Technology)

Keywords:Nanoimprint, Molecular orientation

We examined the depth profile of molecular oreintation induced by nanoimprint-graphoepitaxy.