[15a-423-1~9] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-423-6] Study on the Improvement of Antisticking Layer Resistance against Repeated UV nanoimprint

〇Shuso Iyoshi¹, Makoto Okada¹, Yuichi Haruyama¹, Shinji Matsui¹ (1.Hyogo univ. LASTI)

Keywords:UV nanoimprint, UV curable resin, durability of antisticking layer

With a repeated UV nanoimprinting test machine, the durability of mold antisticking layer (ASL) has been studied. It was revealed that the durability of ASL was engaged in condensable gases, fluorine surfactants, UV nanoimprinting conditions, ASL types, and UV curable resins of resist. This study was focused on UV curable resins of resist. A given UV curable resist was blended with the other UV curable resins having different chemical structures, and how the blend effected the durability of ASL was observe.