[15a-502-1~12] 21.1 Joint Session K

[15a-502-2] The controllable crystallographic orientation of polycrystalline transparent conductive Al-doped ZnO films deposited by direct current magnetron sputtering

〇(PC)Junichi Nomoto¹, Hisashi Kitami^1,2, Takeshi Watanabe³, Hisao Makino¹, Toshiyuki Sakemi², Tetsuya Yamamoto¹ (1.Research Inst. Kochi Univ. Tech., 2.Sumitomo Heavy Industries, Ltd., 3.Japan Synchrotron Radiation Research Inst. (JASRI) SPring-8)

Keywords:ZnO, Crystallographic orientation