Property change of zinc oxide films by element adsorption and desorption annealing

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K

Wed. Mar 15, 2017 9:00 AM - 12:15 PM 502 (502)

Mamoru Furuta(Kochi Univ. of Tech.)

9:45 AM - 10:00 AM

〇rei sugiura¹, Motonari Syoriki¹, Shuhei Funaki¹, Yasuji Yamada¹ (1.Shimane univ)

Keywords:zinc oxide, Sputtering, anneal