Time-resolved probe measurement of after-arc plasma type apparatus for the irradiation of electronegative oxygen ions with dc arc discharge

Hisashi Kitami; Junichi Nomoto; Toshiyuki Sakemi; Hisaso Makino; Yasushi Aoki; Tetsuya Yamamoto

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K

[15a-502-1~12] 21.1 Joint Session K

Wed. Mar 15, 2017 9:00 AM - 12:15 PM 502 (502)

Mamoru Furuta(Kochi Univ. of Tech.)

10:15 AM - 10:30 AM

△ [15a-502-6] Time-resolved probe measurement of after-arc plasma type apparatus for the irradiation of electronegative oxygen ions with dc arc discharge

〇Hisashi Kitami^1,2, Junichi Nomoto², Toshiyuki Sakemi¹, Hisaso Makino^2,3, Yasushi Aoki¹, Tetsuya Yamamoto² (1.Sumitomo Heavy Industries, Ltd., 2.Research Inst., Kochi Univ. Tech., 3.Kochi Univ. Tech.)

Keywords:electronegative oxigen ions, zinc oxide, plasma diagnostics