The 64th JSAP Spring Meeting, 2017

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3 Optics and Photonics » 3.7 Laser processing

[15a-512-1~12] 3.7 Laser processing

Wed. Mar 15, 2017 9:00 AM - 12:15 PM 512 (512)

Satoshi Hasegawa(Utsunomiya Univ.), Takanori Iino(NAIST)

11:00 AM - 11:15 AM

[15a-512-8] Formation of Ni electrode on SiC with thermal annealing assisted by femtosecond laser irradiation

〇(M1)Hiroki Kawakami1, Yoshiki Naoi1, Takuro Tomita1 (1.Tokushima Univ.)

Keywords:femtosecond laser, ohmic electrode