[15a-513-1~8] 13.6 Semiconductor English Session

▼ [15a-513-1] Modification of TiO₂ single crystal surface by laser radiation

〇(DC)Edvins Dauksta^1,2、Vygantas Mizeikis¹、Arturs Medvids²、Masaru Shimomura¹、Yasuo Fukuda¹、Kenji Murakami¹ (1.Shizuoka University、2.Riga Technical University)

キーワード：laser processing, phase transition, anatase

In this study, the effects of laser radiation on TiO₂ rutile single crystals were investigated by Raman spectroscopy and electron backscatter diffraction. Titanium dioxide (TiO₂) is a wide band gap metal oxide semiconductor with numerous applications in science and technology. The main fields are photovoltaics and photocatalytic water purification.
EBSD mapping shows that rutile crystal surface layer is converted to anatase phase after laser irradiation. Also Raman spectroscopy after the laser treatment confirms formation of the anatase phase. We propose that laser induced localized high pressure and high temperature field is the cause of the rutile to anatase phase transition.