[15a-B6-1~11] 17.2 Graphene

[15a-B6-11] High-sensitivity gas sensing by graphene-gate transistors

〇Shintaro Sato¹, Naoki Harada¹, Kenjiro Hayashi¹, Masako Kataoka¹, Junichi Yamaguchi¹, Manabu Ohtomo¹, Mari Ohfuchi¹, Ikuo Soga¹, Daiyu Kondo¹, Taisuke Iwai¹ (1.Fujitsu Labs)

Keywords:graphene, gas sensor, transistor

We have developed a novel graphene-based gas sensor, where graphene is employed as a gate electrode of a silicon transistor. When the graphene gate is exposed and gas molecules adsorb on the graphene surface, the work function of graphene changes depending on the gas species and concentrations, thus changing the threshold of the silicon transistor. This novel graphene-gate sensor exhibits sensitivities more than one order of magnitude higher than those of the conventional resistivity-based graphene gas sensors, detecting NO₂ with concentrations less than 1 ppb. It was also found that the selectivity of several gases also exist.