[15a-P11-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

[15a-P11-6] Local workfunction mapping on a flat p-n junction using KFM

〇(PC)Fumihiko Yamada¹, Takefumi Kamioka¹, Hiroto Mizuno¹, Yoshio Ohshita¹, Itaru Kamiya¹ (1.Toyota Tech. Inst.)

Keywords:Solar cell, KFM, Workfunction measurement

We developped the new set up of AFM/KFM system which can measure the workfunction mapping under dark and illuminated condition. However, the cleaved surface of Si substrate has a rough structure. Therefore, the influence of structure for workfunction measurements was not cleared. Thus we demonstrate the resolution of AFM/KFM setup using cleaved GaAs p-n junction device structure.