[15a-P4-1~13] 1.5 Instrumentation, measurement and Metrology

[15a-P4-9] Conventional, Laboratory Hard X-ray Photoelectron Spectroscopy with Ti Anode

〇Michiko Yoshitake¹, Mykhailo Chundak¹, Sei Fukushima¹ (1.NIMS)

Keywords:phtoelectron spectroscopy, hard X-ray, machine learning

Ti X-ray is a source for high energy X-ray photoelectron spectroscopy in conventional set-up in the laboratory, whose natural energy width is relatively small. However, the energy for Kα₁ and Kα₂ is close giving doublet in the spectra, which makes the analysis difficult. We would try to solve the problem by utilizing machine learning for the spectral analysis.