[15a-P6-1~13] 6.5 Surface Physics, Vacuum

[15a-P6-5] Analysis of Adsorption and Desorption on Si(001) Surface

〇Kazuho Morita¹, Sakura Takeda¹, Tastuya Ebato¹, Yudai Higa¹, Akiho Fujinaka¹, Natsuki Morimoto¹, Masatoshi Yoneda¹, Artoni Kevin R. Ang¹, Hiroshi Daimon¹ (1.NAIST)

Keywords:Silicon, oxyde