[15a-P8-1~31] 12.1 Fabrications and Structure Controls

[15a-P8-1] Reduction of Process Time by Improving theImproving Heating Mechanism of the High-Velocity Molecular-Beam Cell

〇Takuya Matsumoto¹, Masaki Nobunaga¹, Ryosuke Matsubara², Min-Cherl JUNG¹, Hirotaka Kojima¹, Hiroaki Benten¹, Masakazu Nakamura¹ (1.NAIST, 2.Shizuoka Univ.)

Keywords:Vacuum deposition, Organic semiconductor