[15a-P8-1~31] 12.1 Fabrications and Structure Controls

[15a-P8-8] Comparison of Deposition Processes by Damage-less Sputtering and by Vacuum Evaporation in the Deposition of Top Electrode Films for OLED

〇Youichi Hoshi¹, Shin-ichi Kobayashi¹, Yutaka Sawada¹, Takayuki Uchida¹, Yoji Yasuda² (1.Tokyo Polytechnic Univ., 2.Kanagawa Prefectural Junior College for Industrial Technology)

Keywords:sputter-deposition, evaporation, electrode film