[15p-304-1~10] Highly reliable metallization technology for long term retention

[15p-304-7] Stability and electronic properties of Cu thin films covered by atomic layer materials

〇Susumu Okada¹ (1.Univ. Tsukuba)

Keywords:Atomic layer materials

Based on the quantum mechanical simulations, we studied the electronic structure, transport properties, and structural stability of Cu thin films covered by the atomic layer materials. Our calculations showed that the atomic layered materials do not affect the electronic structure and transport properties of Cu thin films. On the other hand, the atomic layer materials prevent oxidization of the Cu thin films.