The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[15p-311-1~18] 6.4 Thin films and New materials

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 311 (311)

Kentaro Shinoda(AIST), Yoshinobu Nakamura(Univ. of Tokyo), Kyoko Namura(Kyoto Univ.)

5:00 PM - 5:15 PM

[15p-311-14] Growth of AlBN films deposited by CAPD and application to hard coating

〇Tomohiro Yoshida1, Kouki Murasawa2, Tsuyoshi Yoshitake3 (1.Fukuoka Industrial Technology Center, 2.OSG Corp., 3.Kyushu Univ.)

Keywords:nitride hard coating, AlBN thin film