The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[15p-311-1~18] 6.4 Thin films and New materials

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 311 (311)

Kentaro Shinoda(AIST), Yoshinobu Nakamura(Univ. of Tokyo), Kyoko Namura(Kyoto Univ.)

6:00 PM - 6:15 PM

[15p-311-18] Deposition of Dense ZrO2 Films by Chelate Flame Method

〇Yutaka Ikeda1, Atsushi Nakamura1,2, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)

Keywords:Chelate Flame Method, Zirconia