[15p-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15p-318-1] Total-electron-yield measurements of insulating organic films by soft X-ray irradiation

〇Yasuji Muramatsu¹, Takahito Ouchi¹ (1.Univ. Hyogo)

Keywords:synchrotron radiation, total electron yield, insulating film

It is generally hard to measure total-electron-yield (TEY) of insulating bulk samples by soft X-ray irradiation. However, we have recently found that TEY of insulating organic films put on conductive substrates can be easily measured through the conductive substrates. It has been confirmed that conductive path can be formed along the X-ray beam path. In this study, TEY measurements of PET films will be demonstrated.