[15p-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15p-318-6] Absolute reflection measurement by laser-driven plasma X-ray laser

〇Takashi Imazono¹ (1.QST)

Keywords:X-ray laser, absolute reflectivity, multilayer

A reflection beam splitter that consists of a Mo/Si multilayer-coated X-ray photodiode detector was fabricated in order to perform absolute reflection measurement by laser-driven plasma X-ray laser (XRL) having a wavelength of 13.9 nm. The absolute reflectivity of a Mo/Si sample mirror measured with XRL has been in good agreement with that measured with synchrotron radiation. It indicates the beam splitter works well as the beam monitor for absolute reflection measurement by XRL.