[15p-411-1~16] 13.9 Optical properties and light-emitting devices

[15p-411-9] Molecular beam epitaxy of Er₂O₃/Y₂O₃ superlattices

〇Hiroo Omi¹, Yuki Ito¹, Takehiko Tawara¹, Hideki Yamamoto¹ (1.NTT BRL)

Keywords:Erbium, Yttrium, molecular beam epitaxy

We have succeeded in growing Er₂O₃/Y₂O₃ supperlattices on Si(111) by molecular beam epitaxy to enhance PL intensity from Er₂O₃ epitaxial layers on Si.