The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Hiroki Akasaka(Titech), Yasuharu Ohgoe(Tokyo Denki Univ.), Takako Nakamura(AIST)

5:15 PM - 5:30 PM

[15p-412-15] Deposition of a-BCN:H films on ball and their tribological properties

〇Keisuke Suzuki1, Nasa Kawagoshi1, Tetsuya Yamamoto2, Naoto Ohtake1, Hiroki Akasaka1 (1.Tokyo Inst. of tech., 2.Nippon shokubai Co., Ltd)

Keywords:B-C-N thin films