[15p-412-1~18] 6.2 Carbon-based thin films

[15p-412-18] Nanopore Fabrication to Two Dimensional Materials on SiO2 Nanopore Membrane Using Helium Ion
Microscope

〇Takumi Hayashi¹, Kawai Kentaro¹, Kenta Arima¹, Mizuho Morita¹ (1.Osaka Univ.)

Keywords:nanopore fabrication, thin membrane transfer

Several nanometers pore can distinguish nucleotides in DNA. Thin nanopore is expected enhancing precise molecule recognition. Here we present thin nanopore fabrication to 2- dimensional membrane. We fabricated nanopores less than 10 nm using focused Helium ion beam. After fabrication of submicrometer pore to free-standing SiO2 membrane on Si, we transferred CVD graphene on Cu to the SiO2 membrane. We also transferred 2D material of BN and MoS2 to freestanding SiO2 membrane. Those number of layer was confirmed by Raman spectroscopy and XPS. Nanopore formation to graphene is carried out in Helium ion microscope. Diameter of less than 10 nm nanopore was fabricated.