The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Hiroki Akasaka(Titech), Yasuharu Ohgoe(Tokyo Denki Univ.), Takako Nakamura(AIST)

3:00 PM - 3:15 PM

△ [15p-412-7] Effect of Oxygen Plasma on Film Structure for Different Types of DLC film

〇(B)Tatsuya Mayama1, Hiroyuki Watanabe1, Masanori Hiratsuka2, Hitomi Tsuboi2, Hideki Nakamori2, Akihiko Homma1, Kenji Hirakuri1, Yasuharu Ohgoe1 (1.Tokyo Denki Univ., 2.Nanotech Corp.)

Keywords:Hydrogenated amorphous carbon, Oxygen plasma treated