[15p-418-1~12] Variety of light sources and possibilities of their applications to novel light processing

[15p-418-8] Surface modification of metal nanoparticle supported polymer materials by laser-driven high-fluence extreme ultraviolet light

〇(PC)Nozomi Tanaka¹, Kiyokazu Yasuda², Nao Wada¹, Ryo Deguchi¹, Akifumi Yogo¹, Hiroaki Nishimura¹ (1.ILE, Osaka Univ., 2.Osaka Univ.)

Keywords:Extreme Ultraviolet (EUV) radiation, Polydimethylsiloxane (PDMS), Surface modification

Energy deposition process of Extreme ultraviolet (EUV) light into materials is expected to be quite effective for surface and near-surface processing. Most of EUV photon energy is absorbed in very shallow area from the surface of any materials. For example, wearable devices on that electrical circuit made of metals are patterned on polymers, require surface and near surface fabrication for adhesion of different materials and controlling functionality of the device. We have studied irradiation effects of EUV radiation on surface structure and interfacial properties of metal nanoparticle supported Polydimethylsiloxane (PDMS). Several effects such as changes in color, particle size, surface structure, and depth profile of elements were confirmed. Such effects were not observed for irradiation of longer wavelength lights. Discussion on the changes in such macroscopic properties and wavelength dependence of the irradiation effects will be presented in the talk.