The 64th JSAP Spring Meeting, 2017

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[15p-503-1~16] 15.4 III-V-group nitride crystals

Wed. Mar 15, 2017 1:45 PM - 6:15 PM 503 (503)

Motoaki Iwaya(Meijo Univ.), Mitsuru Funato(Kyoto Univ.), Yoshihiro Kangawa(Kyushu Univ.)

2:15 PM - 2:30 PM

[15p-503-3] Theoretical Consideration of TMG Decomposition Process Considering Activation Energy

〇Kazuki Sekiguchi1, Hiroki Shirakawa1, Kenta Chokawa1, Masaaki Araidai2,1, Yoshihiro Kangawa3,2, Koichi Kakimoto3, Kenji Shiraishi2,1 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.RIAM, Kyushu Univ.)

Keywords:GaN, MOVPE, Thermodynamic Analyses