[15p-512-1~9] Progress and outlook of nanoimprint technology

[15p-512-5] Progress of roll to roll nanoimprint lithography and next generation target

〇Jun Taniguchi¹ (1.Tokyo Univ. of Sci.)

Keywords:roll to roll nanoimprint lithography, roll mold, UV curable resin

Roll to roll nanoimprint lithography can make the nano scale patterns with high throughput. In this paper, the historical and development of RTR-NIL are explain. In addition, next generation targets are overviewed.