[15p-B6-1~16] 17.2 Graphene

[15p-B6-7] Large-size graphene resonator developed by low-pressure dry transfer technique

〇hayato ishida¹, Tatsuya Iwata¹, Kazuaki Sawada¹, Kazuhiro Takahashi¹ (1.Toyohashi Univ.)

Keywords:graphene, transfer, resonator

Graphene is an excellent material for nanoelectromechanical resonator due to its high electrical conductivity and mechanical toughness. In this report, the resonance characteristics of large-size graphene resonator developed by low-pressure dry transfer technique will be reported. We successfully observed the mechanical resonance in a large-size graphene resonator with a diameter of 30 μm~45 μm. In a resonator with a diameter of 30 μm, a resonant frequency of 1.35 MHz and a quality factor of 300 were obtained.