4:45 PM - 5:15 PM
[15p-MH-6] Evaluation and control of crystal growth process using synchrotron X-rays
Keywords:crystal growth, X-ray diffraction and scattering, in situ measurements
We are discussing the possibility of informatics based on big data produced by in situ synchrotron X-ray measurements during crystal growth. At the synchrotron beamline 11XU of SPring-8, an X-ray diffractometer integrated with a molecular beam epitaxy chamber has been developed and applied to the growth of III-V semiconductors including nitrides. These measurements yield time-resolved three-dimensional reciprocal space maps, which offer comprehensive information about the crystal growth process.