[15p-P2-1~14] 3.15 Silicon photonics

[15p-P2-12] Annealing temperature dependences of crystal grown laser diode structure on directly-bonded InP/Si substrate

〇Masaki Aikawa¹, Tetsuo Nishiyama¹, Naoki Kamada¹, Yuya Onuki¹, Hirokazu Sugiyama¹, Natsuki Hayasaka¹, Kazuki Uchida¹, Xu Han¹, Gandhi Kallarasan Periyanayagam¹, Kazuhiko Shimomura¹ (1.Sophia Univ.)

Keywords:InP, direct bonding, laser diode