Synthesis of Graphene by RF Magnetron Plasma-Enhanced Chemical Vapor Deposition with CH<sub>4</sub>

Presentation information

Oral presentation

8 Plasma Electronics » 8.5 Plasma nanotechnology

Thu. Mar 16, 2017 9:00 AM - 11:30 AM 315 (315)

Kazunori Koga(Kyushu Univ.)

9:15 AM - 9:30 AM

〇(M1)Satoshi Ishidoshiro¹, Shunya Yamada¹, Yuma Kawamura¹, Yasuaki Hayashi¹ (1.Kyoto Inst. Technol.)

Keywords:Graphene