The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

Takanobu Watanabe(Waseda Univ.), Kiyoteru Kobayashi(Tokai Univ.)

9:15 AM - 9:30 AM

[16a-413-2] Theoretical study on interface orientation dependence of Si thermal oxidation ofVertical-BC-MOSFET with compressive strain

〇Shingo Kawachi1, Hiroki Shirakawa1, Kenta Chokawa1, Masaaki Araidai1,2,6, Hiroyuki Kageshima3,6, Tetsuo Endoh4,5,6, Kenji Shiraishi1,2,6 (1.Nagoya Univ., 2.IMaSS, 3.Shimane Univ., 4.Tohoku Univ., 5.CIES, 6.JST-ACCEL)

Keywords:semiconductor, Si thermal oxide film