The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

Takanobu Watanabe(Waseda Univ.), Kiyoteru Kobayashi(Tokai Univ.)

10:15 AM - 10:30 AM

[16a-413-6] Characterization Technique of Charge De-trapping in MIM Capacitors

Koudai Ozawa1, Ryu Hasunuma1, Kikuo Yamabe1 (1.Tsukuba Univ.)

Keywords:MIM, De-trapping