10:15 AM - 10:30 AM
[16a-413-6] Characterization Technique of Charge De-trapping in MIM Capacitors
Keywords:MIM, De-trapping
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)
Takanobu Watanabe(Waseda Univ.), Kiyoteru Kobayashi(Tokai Univ.)
10:15 AM - 10:30 AM
Keywords:MIM, De-trapping