[16a-421-1~11] 3.16 Optics and Photonics English Session

▲ [16a-421-1] Optimization of Narrow Width Effect on Titanium Thermistor for Room-Temperature Antenna-Coupled Terahertz Microbolometer Fabrication

〇Amit Banerjee¹, Hiroaki Satoh¹, Ajay Tiwari¹, Norihisa Hiromoto², Hiroshi Inokawa¹ (1.RIE, Shizuoka Univ., 2.GSST, Shizuoka Univ.)

Keywords:microbolometer, terahertz, temperature coefficient of resistance (TCR)

Considering the importance of the temperature coefficient of resistance (TCR) in antenna-coupled terahertz microbolometer, the narrow width effects on the TCR and resistivity on two different substrates (SiO₂/Si and SiN_X/SiO₂/Si) for titanium (Ti) thermistor is investigated and correlated with reduced grain size measured by the electron backscatter diffraction (EBSD).