10:15 AM - 10:30 AM
[16a-423-6] [JSAP Young Scientist Award Speech] Development of the primary standards of trace moisture for multi-gas
Keywords:trace moisture, semiconductor, humidity
In the manufacturing of semiconductor devices, a lot of moisture analyzers are used in order to measure the residual trace moisture in ultra-pure process gases. Precise and accurate measurement of trace moisture is a challenging problem because moisture is ubiquitous and easily adsorb onto the surface of materials. For the reliable measurement of trace moisture, it is important to develop the measurement standards, and to calibrate the moisture analyzers by comparing their readings and the standard values. In this research, we have been developing the primary standards of trace moisture for nitrogen, argon, oxygen and helium that are especially in high demand among semiconductor process gases.