[16a-424-1~7] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[16a-424-1] [INVITED] Synchrotron radiation photoemission study on surface chemical reactions facilitated by supersonic molecular beams

〇Akitaka Yoshigoe¹ (1.JAEA)

Keywords:molecular beams, synchrotron radiation photoelectron spectroscopy, surface physical chemistry

Chemical reactions between gas molecules and solid surfaces are important subjects for not only fundamental sciences but also technological applications. In this presentation, the studies on adsorption dynamics and novel reactions at surfaces, which can be found out and faciliated by using molecular beams, will be talked. In particular, the results on semicondutor (Si, Ge) surface oxidation using O₂ gas are shown as the useful examples of molecular beams, which can control translational kinetic energies and irradiation directions of reactive gas molecules. The advantages and future perspective of the molecular beam applications also will be talked.