The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[16a-424-1~7] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Thu. Mar 16, 2017 10:00 AM - 12:00 PM 424 (424)

Masahito Tagawa(Kobe Univ.), Hiroshi Tsuji(Kyoto Univ.)

11:15 AM - 11:30 AM

△ [16a-424-5] Determination of crystal orientation dependence of the sputtering yield using polycrystalline metals (2)

〇(M1)Hiroharu Hirai1, Takanori Nagasaki1, Masahito Yoshino1, Tomoaki Yamada1 (1.Nagoya Univ.)

Keywords:sputtering yield, crystal orientation, EBSD