[16a-512-1~8] Imaging of interfaces in thin films and multilayers

[16a-512-7] A New Tool for X-ray Surface and Interface Structure Analysis using an X-ray Phase-Contrast Imaging Technique

〇Wataru Yashiro^1,2 (1.IMRAM, Tohoku Univ., 2.JST-ERATO)

Keywords:X-ray imaging, grating, Ultra-Small-Angle X-ray Scattering (USAXS)

We will report on a new tool for surface and interface structure analysis using X-ray grating interferometry. In a grazing incidence geometry, we applied a fringe scanning method to the specularly reflected X-ray sheet beam, and successfully obtained real-space images of X-ray reflectivity, surface curvature, and ultra-small-angle X-ray scattering.