The 64th JSAP Spring Meeting, 2017

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[16a-B5-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Thu. Mar 16, 2017 9:00 AM - 12:00 PM B5 (B5)

Haruhiko Udono(Ibaraki Univ.), Hirokazu Tatsuoka(Shizuoka Univ.)

9:00 AM - 9:15 AM

[16a-B5-1] Evaluation of BaSi2 thin film fabricated on textured Si substrates by thermal evaporation

〇(B)Michinobu Fujiwara1, Kazuma Takahashi1, Yoshihiko Nakagawa1, Kazuhiro Gotoh1, Yasuyoshi Kurokawa1, Noritaka Usami1 (1.Nagoya Univ.)

Keywords:semiconductor, silicide, texture