[16a-E204-1~10] 2.2 Detection systems

△ [16a-E204-2] Development of polycapillary optics for an STEM-TES-EDS system.

〇Akira Takano¹, Keisuke Maehata¹, Naoko Iyomoto¹, Toru Hara², Kazuhisa Mitsuda³, Noriko Yamasaki³, Keiichi Tanaka⁴ (1.Kyushu Univ., 2.NIMS, 3.JAXA, 4.Hitachi High-Tech Science)

Keywords:Polycapillary, TES microcalorimeter, STEM

An energy-dispersice spectrometer (EDS) system with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed. We used polycapillary optics to collect X-rays. Using original simulation model, we designed new polycapillary optics for multi pixel TES microcalorimeter.