[16a-E204-1~10] 2.2 Detection systems

[16a-E204-8] Development and evaluation of a thin film scintillator for sub-micrometer resolution X-ray imaging

〇Takashi Kameshima^1,2, Akihisa Takeuchi¹, Kentaro Uesugi¹, Togo Kudo^1,2, Makina Yabashi^1,2, Takaki Hatsui^1,2 (1.JASRI, 2.RIKEN)

Keywords:scintillator, X-ray, detector

We have developed a thin film scintillator fabricated by transparent ceramics technology. The constructed X-ray detector equipped with the scintillator has resolved a Tantalum 200 nm line & space pattern. The detector spatial resolution is close to the diffraction limit of 400 nm. In addition to the X-ray imaging results, we will show the observation results of the scintillator grain boundary and the methods to improve the detector imaging performance.