[16a-F203-1~11] 17.3 Layered materials

△ [16a-F203-11] Resonance characteristics of MoS2 thin layer mechanical resonator

〇Daiki Yoshikawa¹, Yuga MIyamoto¹, Kuniharu Takei¹, Takayuki Arie¹, Seiji Akita¹ (1.Osaka Pref Univ.)

Keywords:molybdenum disulfide, resonator

Two-dimensional atomic layer films are attracting attention as useful semiconductor materials from their unique electrical, optical and mechanical properties. Among them, transition metal dichalcogenide (TMDC) such as molybdenum disulfide (MoS 2) is expected to be applied to high performance nanoelectromechanical devices (NEMS), because it has a band gap depending on the number of layers unlike graphene ing. In this research, we investigated the fabrication method of MoS 2 thin film drum type mechanical resonator and the optical measurement method of mechanical resonance characteristics for application to NEMS.