9:30 AM - 11:30 AM
△ [16a-P2-4] Electrochemical Imaging of a Liquid Sample Using Electron-beam Induced Virtual Cathode
Keywords:inverted electron-beam lithography system, virtual cathode, electrochemical imaging
When a wet sample is irradiated with an electron beam of low acceleration voltage through a silicon nitride membrane by an inverted electron-beam lithography system, primary electrons stop and take a charge in the silicon nitride membrane and a local virtual cathode is induced, which generates an electric field and current in the wet sample. By combining this virtual cathode and devices for measuring an electrical potential, I propose an electrochemical microscope which can scan a virtual cathode fast and work on imaging of microobjects in wet samples.