[16a-P3-1~32] 12.7 Biomedical Engineering and Biochips

[16a-P3-12] A multi-spot sensor-chip fabricated on a flexible substrate

〇Akira Emoto¹, Takashi Fukuda² (1.Doshisha Univ., 2.AIST)

Keywords:sensing-chip, flexible substrate, biosensor

We fabricated a sensing-chip based on both plasmon excitation and grating coupling on a flexible substrate. The substrate was made from polyethylene terephthalate (PET). We fabricated an array of hemispherical structure with a diameter of 400 nm on the PET substrate. Ag-layer was then deposited on the array structure. Assuming that any substances were adsorbed on the surface of the array structure, the ambient refractive index was modulated, and then the changes in the extinction spectra were examined. As a result, the sensing function could be confirmed similarly to that on glass substrate.