[16a-P6-1~22] CS.5 9.4/16.2 Code-sharing session

[16a-P6-12] Fabrication and evaluation of stack type thermoelectric thin film module by sputtering method

〇Ken Takayama¹, Masayuki Takashiri¹ (1.Tokai Grad. Sch.)

Keywords:thermoelectric materials, module

Thermoelectric materials are being studied for use in various places as a micro electric power supply device utilizing a small temperature difference in the living environment. Specifically, it is a mobile phone or the like. However, small thermoelectric materials have a problem of low performance. In order to solve this problem, in this study, Bi - Te was formed as an N type and Sb - Te as a P type, and annealing treatment was performed. Thereafter, electric conductivity, Seebeck coefficient, power factor were calculated and the average was obtained. Finally, we evaluated the production and output of the module