[16a-P6-1~22] CS.5 9.4/16.2 Code-sharing session

[16a-P6-13] Effects of metal interlayer thickness on structural and thermoelectric properties of bismuth tellurium thin films deposited by radio-frequency magnetron sputtering

〇Yusuke Sasaki¹, Masayuki Takashiri¹ (1.Tokai Grad Sch.)

Keywords:thermoelectric, interlayer, radio-frequency magnetron sputtering

Due to the nuclear accident of the Great East Japan Earthquake, expectations for environmental power generation technology are increasing. There is thermoelectric power generation in the technology. However, there are problems such as high cost and low performance. In this research, thin film technology was used as cost reduction. The purpose of improving the thermoelectric properties was to improve the crystal structure of the Bi - Te thin film by the material and film thickness of the metal interlayer. As a final goal, we aim to apply thin films with enhanced performance and adhesion to thin film type modules.