[16a-P6-1~22] CS.5 9.4/16.2 Code-sharing session

[16a-P6-8] Observation of nano crystals in a-Si/Ge film by annealing in situ X ray diffraction

〇Masahiro Adachi¹, Ryo Toyoshima¹, Kazuya Tokuda¹, Yoshihiro Saito¹, Syunsuke Fujii¹, Makoto Kiyama¹, Yoshiyuki Yamamoto¹, Yusuke Nishino², Muthusamy Omprakash², Tsunehiro Takeuchi² (1.SEI, 2.Toyota Tech. Inst.)

Keywords:Thermoelectric materials, Nano structured materials