[16a-P7-1~13] ナノバイオテクノロジーとバイオセンシングに関するジョイントシンポジウム

▲ [16a-P7-9] An Improved Performance of Chemical Imaging Sensor with a Partially Etched Structure of Light-addressable Potentiometric Sensor

〇(D)Truong HoangAnh¹、Werner Carl Frederik²、Miyamoto Koichiro²、Yoshinobu Tatsuo^1,2 (1.Department of Biomedical Eng., Tohoku Univ.、2.Department of Electronic Eng., Tohoku Univ.)

キーワード：chemical imaging sensor, LAPS, partially etched

A partilally etched structure of light-addressable potentiometric sensor (LAPS) was fabricated for high-resolution and high-speed measurements in the visualization of chemical species. The structure was optimized by the anisotropic etching process based on Tetramethylammonium hydroxide (TMAH). It was shown that the etched region can achieve higher resolution than the non-etched region. This represents a new approach for a measurement device which can strike a balance between the high spatial resolution and the mechanical strength of the sensor plate.