[16p-213-1~14] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[16p-213-1] Deformation Mechanism of Ru-La Gels

〇Junichi Mihara¹, Daisuke Hirose¹, Tatsuya Shimoda¹ (1.JAIST)

Keywords:printed electronics, imprint, rheology

Nano-Rheology Printing is the patterning process of metal oxide gels. This process involves fine patterning of the precursor gel by thermal nano-imprinting and sintering. In previous work, we have successfully patterned Ru-La-O line width of 30nm and discovered that Ru and La mixing ratio affects on formability. However, the principle is not revealed. In this work, we measured viscoelasticity to evaluate the deformability of Ru-La gels. Furthermore, we considered the deformation mechanism from thermal analysis and high energy X-ray diffraction.