[16p-303-1~7] Automotive MEMS devices and related technologies for autonomous cruising

[16p-303-2] Optical MEMS Devices for Laser Radar Application

〇Toshiyuki Tsuchiya¹ (1.Kyoto Univ.)

Keywords:MEMS, LiDAR, vibrating mirror

For an environment surrounding situation monitoring system in automatic driving / automatic driving vehicles, it is expected to use a laser radar (LiDAR) which scans the surrundings with a laser and measures the reflected light and monitorss the position and distance of the surrounding objects. The MEMS (microelectromechanical system) device is being studied for its use as a device for scanning an object because of strong demand for miniaturization, cost reduction of the system. Present status and issues are reported mainly on vibration mirror devices using MEMS.