[16p-303-1~7] 自動走行に資する車載MEMSデバイスと関連技術

▼ [16p-303-5] Rate Integrating MEMS Gyroscope with Sub-Hz Frequency Symmetry
and Temperature Robustness

〇GinerdeHaro Joan Josep¹、Zhang Yuhua¹、Ono Kazuo¹、Maeda Daisuke¹、Sekiguchi Tomonori¹ (1.Hitachi Ltd.)

キーワード：MEMS Gyroscope, Rate integrating, Frequency Symmetry

We introduce a novel architecture for a MEMS rate integrating gyroscope base on the concept of concentrated springs. Rate integrating gyroscopes require high Q factors an low frequency split (Δf) between the drive and sense frequency. The concept explore the idea of reducing the area of the sensitive elements to mitigate fabrication imperfections and achieve devices with frequency symmetry Δf<1Hz and Q factor over 300KHz. Device symmetry provides robustness against temperature changes. This work is a step further to provide cost effective, reliable solutions for autonomous car navigation.